1. 1. T. Masuzawa, ―State of the art of micromachining,‖ CIRP Annals—Manufacturing Technology, vol. 49, no. 2, pp. 473–488, 2000.
   2. K. Egashira, T. Masuzawa, M. Fujino, and X. Q. Sun, ―Application of USM to micromachining by on-themachine tool fabrication,‖ International Journal of Electrical Machining, no. 2, pp. 31–36, 1997.
   3. K. Egashira and T. Masuzawa, ―Micro ultrasonic machining by the application of workpiece vibration,‖ CIRP Annals—Manufacturing Technology, vol. 48, no. 1, pp. 131–134, 1999.
   4. X. Q. Sun, T. Masuzawa, and M. Fujino, ―Micro ultrasonic machining and its applications in MEMS,‖ Sensors and Actuators, A, vol. 57, no. 2, pp. 159–164, 1996.
   5. K. Egashira, K. Mizutani, and T. Nagao, ―Ultrasonic vibration drilling of microholes in glass,‖ CIRP Annals— Manufacturing Technology, vol. 51, no. 1, pp. 339–342, 2002.
   6. IC. Zhang, R. Rentsch, and E. Brinksmeier, ―Advances in micro ultrasonic assisted lapping of microstructures in hard-brittle materials: a brief review and outlook,‖ International Journal of Machine Tools and Manufacture, vol. 45, no. 7-8, pp. 881–890, 2005.
   7. S. Koshimizu and I. Iansaki, ―Hybrid machining of hard and brittle materials,‖ Journal of Mechanical Working Technology, vol. 17, pp. 333–341, 1988
   8. Yu, Z. Y., Rajurkar, K. P., Tandon, A, ―Study of 3D Micro-Ultrasonic Machining‖, Journal of Manufacturing Science and Engineering, 126/4: 727- 732,2004